Type: | Two Zone Tube Furnace |
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Certification: | CE |
Structure: | Horizontal Type |
Brand: | Cyky |
Max. Temperature: | 1200c |
Heating Element: | Resistance Wire |
Customization: |
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CY-O1200-60I-CVD is a CE certified splittable single zone tube furnace with 60mm diameter quartz tube, mechanical vacuum pump and four channel gas flowing system. It can achieve a maximum vacuum up to 10-2 torr and mix 1-4 types of gases for CVD or diffusion.It is widely used for laboratory thin film preparation.
Model No. |
CY-O1200-60I-CVD |
Display |
LCD Touch Panel |
Limiting temperature |
1200ºC |
Working temperature |
≤1100ºC |
Heating rate |
0-20ºC/min |
Heating Zone length |
440mm, constant temperature zone:200mm |
Quartz tube diameter |
OD60*1000mm |
Temperature accuracy |
± 1ºC |
Heating element |
Fe-Cr-Al alloy adopt by Mo |
Thermal couple |
K TYPE |
Cooling method |
Double layer structure with fan cooling |
Temperature control |
30 steps programmable PID control |
Chamber material |
Alumina fiber |
Over-temperature alarm |
Yes |
Over-current alarm |
Yes |
Sealing flange |
S.S vacuum flange |
Vacuum pump |
Mechanical rotary vacuum pump(optional) |
Cooling method |
Air cooling |
Connection pipe |
stainless steel bellows, manual flap valve |
Gas Mixer |
2 way gas mixer |
Accuracy |
±2%F.S. |
Repeat accuracy |
±0.2% FS |
Linear precision |
±1%F.S. |
Working pressure: |
-0.1MPa~0.15MPa |
MFC1 Range |
0~100SCCM |
MFC2 Range |
0~200SCCM |
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