Pecvd Tube Furnace System with 500W RF Generator
|FOB Price:||US $18,000 / Piece|
|Min. Order:||1 Piece|
|Min. Order||FOB Price|
|1 Piece||US $18,000/ Piece|
|Production Capacity:||500 Sets Per Month|
|Payment Terms:||L/C, T/T, Western Union|
- Model NO.: CY-O1200-60-4CLV-PE
- Certification: CE, RoHS, UL
- Brand: Cyky
- Max. Temperature: 1200c
- Heating Element: Resistance Wire
- Delivery: Within 2 Weeks
- Transport Package: Wooden Case
- HS Code: 85141090
- Type: Film Deposition
- Structure: Horizontal Type
- Product Name: Pecvd Tube Furnace System
- Tube Material: Quartz Tube
- Warranty: 1 Year
- Trademark: cykyfurnace
- Origin: China
Description of the PECVD tube furnace system:
CY-O1200-60-4CLV-PE (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 500W RF plasma source, 2" or 3.14" O.D optional split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high quality mechanical pump. The PE-CVD furnace is an ideal and affordable tool to deposit thin films or grow nano-wire from a gas state (vapor) to a solid state.
Outstanding features of the pecvd tube furnace
1. Lower temperature processing compared to conventional CVD.
2. Film stress can be controlled by high/low frequency mixing techniques.
3. Control over stoichiometry via process conditions.
4. Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.
Specification of the PECVD tube furnace system:
|Split Tube furnace||Input power: 208 - 240V AC, 1.2kW|
1200°C Max. working temperature for < 60 minutes
1100°C Max for continuous heating
High purity quartz tube 2"OD x 1.7"ID x 39.4" Length
30 segments programmable precision digital temperature controller
8" (200mm), single zone. 2.3" (60mm) (+/-1°C) @ 1000°C
|Optional 1: touch screen tube furnace|
|Optional 2: tube furnace with LED display controller|
|Plasma RF Generator||Output Power:5 -500W adjustable with ± 1% stability|
RF frequency: 13.56 MHz ±0.005% stability Reflection Power: 200W max.
RF Output Port: 50 Ω, N-type, female
Noise: <50 dB.
Cooling: Air cooling.
Power : 208-240VAC, 50/60Hz
|Vacuum Flange and Fittings||Vacuum flange set is made of stainless steel 304. |
Left flange assembly includes a KF-25 vacuum port, two KF-25 quick clamp,
A KF-25 right angle valve, a KF-25 vacuum bellows, a flange Support 1/4 O.D Hose fitting, and a needle valve.
Right flange assembly includes a digital pirani gauge, 1/4 O.D tube fitting, 1/4" Feedthrough and a needle valve.
|Vacuum Pump||AC 220V 50 Hz 1/2HP 375W|
2 Liter /S or 120 liter/m
Oil trap (inlet) and exhaust filter (outlet) are installed.
Max. vacuum: 10-2 torr
For high vacuum degree upto 10-4 Pa, please order our molecular pump system with extra cost.
|Warranty||12 month (exclusive wearing part)|
reference picture of the PECVD system:
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our company information:
Zhengzhou CY Scientific Instrument Co., Ltd.-founded in 2013 by a group of professional engineers from KJ group.CY is a high and new technology enterprise registered in Zhengzhou,Henan province. CY Scientific Instrument mainly provide regular furnace for lab. Also do customized furnace and some other related accessories and equpments in high quality and low cost precision machines for material research and R&D lab. Our mainly products include high temperature furnace,include 1200/1400/1700 degree muffle furnace,1200/1400/1700 degree tube furnace, dental furnace, vacuum furnace,gold melting furnace, SiC heating element, MoSi2 heating element, alumina tubes and crucibles, and etc.