| Type: | Pecvd Tube Furnace |
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| Certification: | CE, ISO |
| Structure: | Horizontal Type |
| Brand: | Cyky |
| Max. Temperature: | 1200c |
| Working Temperature: | 1100c |
| Customization: |
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Audited Supplier | Slidable Split Tube furnace | · Input power: 208 - 240V AC, 1.2kW · 1200°C Max. working temperature for < 60 minutes · 1100°C Max for continuous heating · High purity quartz tube 2"OD x 1.7"ID x 39.4" Length · 30 segments programmable precision digital temperature controller · 8" (200mm), single zone. 2.3" (60mm) (+/-1°C) @ 1000°C The following picture shows the temp. distribution across the heating zone, please click to enlarge. |
| Plasma RF Generator | · Output Power: 5 -300W adjustable with ± 1% stability · RF frequency: 13.56 MHz ±0.005% stability · Reflection Power: 200W max. · Matching: Automatic · RF Output Port: 50 Ω, N-type, female · Noise: <50 dB. · Cooling: Air cooling. (water cooling is available upon request, and a water chiller can be ordered seperately) · Power : 208-240VAC, 50/60Hz |
| Vacuum Flange and Fittings | · Vacuum flange set is made of stainless steel 304. · Left flange assembly includes a KF-25 vacuum port, two KF-25 quick clamp,a KF-25 right angle valve, a KF-25 vacuum bellows, a flange support 1/4 O.D hose fitting, and a needle valve. · Right flange assembly includes a digital pirani gauge, 1/4 O.D tube fitting, 1/4" feedthrough and a needle valve. |
| Vacuum Pump | · AC 220V 50 Hz 1/2HP 375W · 2 Liter /S or 120 liter/m · Oil trap (inlet) and exhaust filter (outlet) are installed. · Max. vacuum: 10-2 torr Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV. This is a vacuum pressure regulating system with motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torr. |
| Product Dimensions | · Overall Dimensions: 1500mm x 600mm x 1200mm (all system, L x W x H) · Net weight: 350 lbs · Shipping weight: 480 lbs |
| Optionals | · Please choose below gas delivery systems based on your buddget ( click underlined or picture to order ) o Low cost Compact Anti-Corrosion Three Channel Gas Mixer o Compact Liquid Vaporization Systems o Three Channels MFC Gas Control System o Constant temperature control module |
| Warranty | · One year limited warranty with lift time support (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.) |
| Compliance | · CE Certified · Temperature controller is MET and CE Certified |
| Warning | · The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure) · Attention: Due to the high pressure gas output from the gas cylinder, it is necessary to install the gas pressure regulator with it to reduce the output pressure, avoid overpressurizing the furance chamber and ensure a safe operation. |
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