• Ultrasonic Spin-Spray Coater (300-3000 rpm, 12" Wafer Max)
  • Ultrasonic Spin-Spray Coater (300-3000 rpm, 12" Wafer Max)
  • Ultrasonic Spin-Spray Coater (300-3000 rpm, 12" Wafer Max)
  • Ultrasonic Spin-Spray Coater (300-3000 rpm, 12" Wafer Max)
  • Ultrasonic Spin-Spray Coater (300-3000 rpm, 12" Wafer Max)

Ultrasonic Spin-Spray Coater (300-3000 rpm, 12" Wafer Max)

Customized: Customized
Structure: Desktop
Material: Steel
Certification: CE, TUV
Application: School, Lab
Type: Spin Coater
Customization:
Diamond Member Since 2016

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Basic Info.

Model NO.
VTC-300USS
Transport Package
Ply Wooden Carton
Trademark
CYKY
Origin
Zhengzhou, China
HS Code
8486109000
Production Capacity
20 Sets/Month

Product Description

VTC-300USS is a cost effective ultrasonic Spin-Spray Coater for liquid-phase, ultra-uniform coating process on a large substrate up to 12". The system consists of
a 12" spin coater with the vacuum chuck, compressed air assisted ultrasonic spray nozzle mounted on a swing arm, a heatable syringe pumpA heat lamp for substrate heating (optional).  

SPECIFICATIONS:
Features
 
Combine the benefits of both spin and spray, enabling dense and uniform liquid-phase coating onto a large substrateApplications include low-temperature precipitation (e.g., for RF/microwave ferrites deposition), polymer coating, powder and composite material coating, and coating on a patterned/uneven substrateThe system also works on spin alone and spray alone modes
Spin Coater Vacuum chunk with adjustable substrate holders for holding flat substrate up to 12" diameter or 8" squareOne oil-less pump for the vacuum chunk is included and controlled by the spin coaterSpin speed: 300 - 3000 rpm adjustableFor safety concerns, the speed is recommended to be limited to 2000 rpm for wafers larger than 8"
Ultrasonic Spray Nozzle One ultrasonic generator with two ultrasonic sprays nozzles with compressed air shaper is includedTwo spray nozzles with the KF-25 adapter are included.One cylindrical type -- narrower spray ~20 mm diameterOne cone type -- wider spray ~40 mm diameterRecommended compressed air pressure for aqueous solution: ~2 psiOne flow meter is integrated for regulating and monitoring the compressed air flowFluid viscosity range: 1 - 50 mPa·s (cP)One swing arm for mounting ultrasonic spray head is built-in with adjustable speed and movement range
Heatable Syringe Pump A heatable syringe pump with LCD touch screen control is included for delivering liquid to the ultrasonic nozzleOne 50 mL syringe is included for immediate use. The unit can accommodate syringe with 0.4 - 30 mm diameterPumping rate: 0.1 - 45 mm/min adjustable (0.08 mL/min - 35 mL/min for the included 50 mL syringe)Flexible Polyimide heater with 30 segments programmable temperature controller is built-in for heating up to 75 °C
Optional
 
Halogen light heater (1000 W max power. Up to 80 ºC) with thermocouple and temperature controller can be ordered at extra cost for heating substrate by radiation (up to 65 ºC with 12" metal substrate)Strongly suggests you to place the spin-spray coater inside a fume hood for health and safety concerns. A secondary ultrasonic spray unit can be ordered and mounted on the swing arm for co-deposition or co-precipitation processFor the above application, an independently controlled, two-channel heatable syringe pump can be ordered at extra cost to replace the standard syringe pump   
Utility Requirement Power: 208 - 240 VAC, 50/60 Hz, 3000 W in totalGas: ~2 psi compressed air for the ultrasonic nozzle.
Net Weight 160 lbs
Shipping Size 45" L x 50" W x 50" H
Shipping Weight 200 lbs
Compliance CE Certified
Warranty One year limited with lifetime supportRusting and damage due to improper storage condition or maintenance are not covered by warranty

Ultrasonic Spin-Spray Coater (300-3000 rpm, 12" Wafer Max)

Ultrasonic Spin-Spray Coater (300-3000 rpm, 12" Wafer Max)
Ultrasonic Spin-Spray Coater (300-3000 rpm, 12" Wafer Max)
Ultrasonic Spin-Spray Coater (300-3000 rpm, 12" Wafer Max)


 

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