Laboratory Flexible Metal Foil Electrode Preparation 1200 Celcius Single/Multi Heating Zone Double Tube Slide CVD System

• Type: CVD Film Preparation
• Certification: TUV
• Structure: Horizontal Type
• Brand: Cyky
• Transport Package: Standard Ply Wooden Box
• Specification: O. D100*400mm heating zone
• Model NO.: CY-O1200-100IT-S3ZD
• Origin: Zhengzhou, China
• HS Code: 85143090
• Production Capacity: 100sets/Month

Product Description

                    Laboratory Flexible metal foil electrode preparation  1200 celcius Single/Multi Heating zone                                                                                      Double Tube Slide CVD system

Name	1200ºC Double Tube Single/Multi zone Slide CVD System
Model No.	CY-O1200-100IT-S3ZD	CY-O1200-100IIT-S3ZD		CY-O1200-100IIIT-S3ZT
Max Temper	1200ºC
Heating zone	420mm	610mm		940mm
Constant zone	210mm	400mm		700mm
Heating zone	Single zone	Double zone		Three zone
Quartz diameter	Inner diameter:Φ80mm  Outer diameter:Φ100mm
Rated power	2.5Kw	4.8Kw			7.2Kw
Rated voltage	220V	220V			380V(three phase)
Sliding distance	290mm	485mm			650mm
Sliding method	Manual/Auto programmable control
Temperature control	PID Programmable control, 30 steps curves
Temperature accuracy	±1ºC
Double Tube Sealing Flange	Adopt double flange extensible multi-function double clamp connection,and independently inner tube and outer tube for vacuum and gas flow control.
Gas Control Method	Mass Flow Controller
Gas way	3 gas way
Flow speed range	0-500sccm, or as customized
Accuracy	±1%F.S
Response time	≤4sec
Working surrounding temperature	5-45ºC
Working pressure	Inlet Pressure 0.05-0.3Mpa
Vacuum range	10Pa-100Pa		1x10-3Pa-1x10-1Pa
Vacuum pump	Double stange mechanical pump, Vacuum:3x10-1Pa, Pump speed:4L/S,		Turbo pump set Vacuum:5x10-6Pa Pumping speed:1600L/S
Outer dimension	530×1440×750mm		530×1440×750mm
Gross weight	240Kg		340Kg

 

Packaging

PLY WOOD BOX as below picture show. or as customer request.

Shipping and transportation

As customer request. Generally, Our mode of transport are as by sea, by air or rail transport

Warranty
Main product is 15 month, except wearing parts.

Company Information

Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches. Independence and innovation is the company's tenet.Welcome you come to visit us for business inspection.